High-resolution continuous-time interface for micromachined capacitive accelerometer

High-resolution continuous-time interface for micromachined capacitive accelerometer

High-resolution micromachined interferometric accelerometer

We demonstrate a promising type of microfabricated accelerometer that is based on the optical interferometer. The interferometer consists of surface-micromachined interdigital fingers that are alternately attached to a proof mass and support substrate. Illuminating the fingers with coherent light generates a series of diffracted optical beams. Subangstrom displacements between the proof mass an...

Continuous-time interface for a micromachined capacitive accelerometer with NEA of 4 g and bandwidth of 300 Hz

A continuous-time accelerometer interface is feasible when a high dynamic range together with a wide signal band is required. In this paper the implementation of a continuous-time force-feedback loop for a capacitive sensor element with a full-scale signal of ±1.5 g is presented. The interface is measured to attain a noise equivalent acceleration (NEA) density of 500 ng/ √ Hz at 30 Hz for the o...

AN INTEGRATED SURFACE MICROMACHINED CAPACITIVE LATERAL ACCELEROMETER WITH 2μG/√Hz RESOLUTION

A capacitive position measurement interface minimizes noise from parasitics in the electromechanical interface and uses correlated double sampling to achieve better than 10Å/√Hz displacement resolution. This translates into 2μG/√Hz acceleration resolution when the device is operated in a vacuum.

A wide-range micromachined threshold accelerometer array and interface circuit

This paper presents a complete threshold acceleration detection microsystem comprising an array of threshold accelerometers and a low power interface circuit. The sensors were designed and fabricated using the bulk-silicon dissolved-wafer process. The process offers a wide latitude in sensor threshold levels, as demonstrated in the fabrication of devices with levels of 1.5–1000 g, bandwidths of...